系列

Sentaurus入门（1）：工艺仿真

基于

MOOC课程《半导体器件原理与仿真设计》
https://www.icourse163.org/course/ECNU-1003476011?tid=1206787208

4.4.2 npn型晶体管的二维Sentaurus Process建模流程介绍

sprocess

用文件夹下用terminal方式运行

sprocess 2d_npn_fps.cmd

参考https://si.ldyycf.xyz/?p=294.4.2 建模部分代码

tecplot_sv

通过tecplot_sv指令查看tdr文件。

在这里插入图片描述

sdevice

sdevice gummel_des.cmd

代码见https://si.ldyycf.xyz/?p=29
4.4.3 npn型晶体管的电学二维仿真
正向gummel

File {
    * input files
    Grid= "n@node@_vert_npn5_fps.tdr"
    * output files
    Current= "npn_Gummel"
    Plot= "npn_Gummel"
    Output= "npn_Gummel"
}


Electrode {
    { Name= "emitter"   Voltage= 0 }
    { Name= "base"      Voltage= 0 }
    { Name= "collector" Voltage= 0 }
}

Physics {
    Hydrodynamic( eTemperature )
    EffectiveIntrinsicDensity(BandGapNarrowing(Slotboom))
    Mobility (
        DopingDependence
            HighFieldSaturation
    )
    Recombination (
        Auger
        SRH(DopingDependence)
        Avalanche(Okuto)
    )
}

Plot {
    * --Density and Current, etc
    eDensity hDensity
    TotalCurrent/Vector 
    eMobility hMobility
    eVelocity hVelocity
    eQuasiFermi hQuasiFermi

    *--Temprerature
    eTemperature Temperature hTemperature

    *--Fields and charges
    ElectricField/Vector Potential SpaceCharge

    *--Band structure
    BandGap
    BandGapNarrowing
    Affinity
    ConductionBand ValenceBand
    xMoleFraction
}

Math {
    NumberOfThreads= 6
    Extrapolate
    Notdamped= 50
    Iterations= 15
    ExitOnFailure
    Digits= 7
    DrForceRefDens= 1e12
    eMobilityAveraging= ElementEdge
    hMobilityAveraging= ElementEdge
    GeometricDistances
    ParameterInheritance= Flatten
}

Solve {
    * initial guess
    Coupled ( Iterations= 100 ) { Poisson }
    coupled { Poisson Electron Hole }

    *base and colletor and base ramp
    Quasistationary (
        InitialStep= 1e-3 Increment= 1.5
        Minstep= 1e-6 MaxStep= 0.03
        Goal { Name= "base"     Voltage= 1.1 }
        Goal { Name= "collector"    Voltage= 1.1 }
    ){  Coupled { Poisson Electron Hole }
        CurrentPlot ( Time= (Range= (0 1) intervals= 50))
        Plot( FilePrefix= "npn_snap" Time= (0.5;0.7) NoOverWrite)
    }
}